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事業案内


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Please contact ROKKO at
Attention Mr.:EGAWA/
Overseas Sales Dept.

TEL: 81-798-65-4508
FAX: 81-798-67-5038

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power device

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reclaim

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sapphire & SiC specialized grinder

knife edge prevention process

back grinder

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for pattern wafer RCA cleaning


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ISO9001&ISO14001

経営革新計画

阪神南リーディングテクノロジー

中小企業庁承認BCP

西宮市元気産業育成補助金

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円高エネルギー制約対策補助金

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事業高度化計画

中小企業海外進出調査支援事業

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平成24年度西宮市優良事業所顕彰受賞


ROKKO ELECTRONICS Co., Ltd.

Zipp: 663-8105
8-5, Nakajima-cho, Nishinomiya-city, Hyogo, Japan





SIIQ

NEDIA

SiCアライアンス

SiC及び関連ワイドギャップ半導体研究会

パワーデバイス・イネーブリング協会


■  Monitor wafer reclaiming



モニター再生加工
New equipment:Wafer sorter for resistivity・P/N・thickness
Wafer sorter for resistivity・P/N・thickness

Wafer sorter for resistivity・P/N・thickness
For 4,5,6,8 inch
Wafer sorter for resistivity・P/N・thickness

Wafer sorter for resistivity・P/N・thickness
Measurable resistivity:1.0m〜3.0MΩ・cm


■ Tools and Equipment
Film sorting   Film stripping

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Wafers are sorted by different types of films by well experienced operators.

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Films on wafers are removed by the selected chemicals.
Thickness sorting
  Wafer mounting

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Wafers are sorted by thickness after film stripping.

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Wafers are mounted on a ceramic plate for polishing.
Batch system polishing machine
  Wafer demounting

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Multiple wafers are polished concurrently.

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Wafers are demounted from a ceramic plate after polishing.
RCA cleaning   Particle counter

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Wafers are cleaned to remove metal contaminations and particles.

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This tool inspects particles on polished wafer surfaces.
Final inspection   Total reflection x-ray fluorescence analysis tool TREX610

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Wafers are inspected to comply with customer’s specifications.

枚葉式研磨機
Measurable elements: 12 elements (S, Cl, K, Ca, Ti, Cr,Mn,Fe,Co,Ni,Cu,Zn)
TOPAbout usBusiness InformationCompany AspectProcess TechnologiesQuality・EnviromentTOPICSAccessContact usPrivacy PolicyPower deviceSensor deviceMonitor wafer reclaimMEMS/PrototypeSiCSapphire waferAssuranceQualityEnviromentSafetyPremium processInspection equipmentSapphire & SiC specialized grinderKnife edge prevention processBack graindPolishFor pattern wafer RCA cleaning
六甲電子株式会社
兵庫県西宮市中島町8番5号 TEL : 0798-65-4508
c2010, ROKKO, All Rights Reserved.