This is recycling services
enables monitor wafers used in the semiconductor process to
be used again by refining their conditions to the original
quality.
Through the services, monitor wafers can be used repeatedly
to reduce material costs.
Wafer size：
３ inch
４ inch
５ inch
６ inch
Film
stripping
Selected recipe
Incoming
inspection
Polishing
Classify thickness and film type
Shipping
Final
inspection
Cleaning
Particle,Metal contamination,Thickness
RCA cleaning
■ New equipment：Wafer
sorter for resistivity・P/N・thickness
● Wafer sorter for resistivity・P/N・thickness
For 4,5,6,8 inch
● Wafer sorter for resistivity・P/N・thickness
Measurable resistivity：1.0m～3.0MΩ・cm
■ Tools and Equipment
Film sorting
Film stripping
Wafers are sorted by different types of films by well experienced
operators.
Films on wafers are removed by the selected chemicals.
Thickness sorting
Wafer mounting
Wafers are sorted by thickness after film stripping.
Wafers are mounted on a ceramic plate for polishing.
Batch system polishing
machine
Wafer demounting
Multiple wafers are polished concurrently.
Wafers are demounted from a ceramic plate after polishing.
RCA cleaning
Particle counter
Wafers are cleaned to remove metal contaminations and particles.
This tool inspects particles on polished wafer surfaces.
Final inspection
Total reflection x-ray
fluorescence analysis tool TREX610
Wafers are inspected to comply with customer’s specifications.
Measurable elements: 12 elements (S, Cl, K, Ca, Ti, Cr,Mn,Fe,Co,Ni,Cu,Zn)
